Measurement of the oxygen and impurity distribution in polycrystalline aluminum nitride with secondary ion mass spectrometry Gregg e. potter ... [et al.]
Presented in part at the 92nd Annual Meeting of the American Ceramic Society, Dallas, April 23, 1990 (Symposium on Substrates for Electronics).
| Main Author: | - |
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| Other Authors: | Potter, Gregg E |
| Format: | Livro |
| Language: | ngs |
| Published: |
2018
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| Subjects: | |
| Online Access: |
http://www.redebim.dphdm.mar.mil.br/pergamum/biblioteca/index.php?codAcervo=55078 http://repositorio.mar.mil.br/handle/ripcmb/637795 |
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