Handbook of microlithography, and microfabrication
Nota: - v.1. microlithography. - v.2 . micromachining and microfabrication.
| Format: | Online |
|---|---|
| Published: |
Bellingham: London : Spie - The International Society For Optical Engneering,
1997
|
| Online Access: |
https://consultaredebie.decex.eb.mil.br/pergamum/biblioteca/index.php?codAcervo=424318 |
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| id |
ir-perga-oai-424318 |
|---|---|
| recordtype |
redebie |
| spelling |
ir-perga-oai-4243182019-03-07T15:13:09Z Handbook of microlithography, and microfabrication Microlitografia Nota: - v.1. microlithography. - v.2 . micromachining and microfabrication. Bellingham: London : Spie - The International Society For Optical Engneering, Rai-choudhury, P. ed. 1997. https://consultaredebie.decex.eb.mil.br/pergamum/biblioteca/index.php?codAcervo=424318 |
| institution |
REDEBIE |
| collection |
REDEBIE |
| format |
Online |
| title |
Handbook of microlithography, and microfabrication |
| spellingShingle |
Handbook of microlithography, and microfabrication |
| title_short |
Handbook of microlithography, and microfabrication |
| title_full |
Handbook of microlithography, and microfabrication |
| title_fullStr |
Handbook of microlithography, and microfabrication |
| title_full_unstemmed |
Handbook of microlithography, and microfabrication |
| title_sort |
handbook of microlithography, and microfabrication |
| description |
Nota: - v.1. microlithography. - v.2 . micromachining and microfabrication. |
| publisher |
Bellingham: London : Spie - The International Society For Optical Engneering, |
| publishDate |
1997 |
| url |
https://consultaredebie.decex.eb.mil.br/pergamum/biblioteca/index.php?codAcervo=424318 |
| _version_ |
1689972930854780928 |
| score |
13.657419 |