Handbook of microlithography, and microfabrication
Nota: - v.1. microlithography. - v.2 . micromachining and microfabrication.
| Format: | Online |
|---|---|
| Published: |
Bellingham: London : Spie - The International Society For Optical Engneering,
1997
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| Online Access: |
https://consultaredebie.decex.eb.mil.br/pergamum/biblioteca/index.php?codAcervo=424318 |
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