Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]

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Main Author: -
Other Authors: Hsu, Peipei
Format: Livro
Language: ngs
Published: 2018
Subjects:
Online Access: http://www.redebim.dphdm.mar.mil.br/pergamum/biblioteca/index.php?codAcervo=53932
http://repositorio.mar.mil.br/handle/ripcmb/679457
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