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Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]

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Main Author: -
Other Authors: Hsu, Peipei
Format: Livro
Language: ngs
Published: 2018
Subjects:
Agentes oxidantes
Oxidação
Online Access: http://www.redebim.dphdm.mar.mil.br/pergamum/biblioteca/index.php?codAcervo=53932
http://repositorio.mar.mil.br/handle/ripcmb/679457
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spelling oai:localhost:ripcmb-6794572018-07-17T15:46:45Z Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.] - Hsu, Peipei Agentes oxidantes Oxidação Inclui bibliografia 2018-07-17T15:46:45Z 2018-07-17T15:46:45Z 2018 Livro http://www.redebim.dphdm.mar.mil.br/pergamum/biblioteca/index.php?codAcervo=53932 http://repositorio.mar.mil.br/handle/ripcmb/679457 ngs Acesso livre
institution REPOSITORIO MARINHA
collection REPOSITORIO MARINHA
language ngs
topic Agentes oxidantes
Oxidação
spellingShingle Agentes oxidantes
Oxidação
-
Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
description Inclui bibliografia
author2 Hsu, Peipei
format Livro
author -
author_sort -
title Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
title_short Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
title_full Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
title_fullStr Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
title_full_unstemmed Oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine Peipei hsu...[etal.]
title_sort oxidation of silicon, silicon carbide, and silicon nitride in gases containing oxygen and chlorine peipei hsu...[etal.]
publishDate 2018
url http://www.redebim.dphdm.mar.mil.br/pergamum/biblioteca/index.php?codAcervo=53932
http://repositorio.mar.mil.br/handle/ripcmb/679457
_version_ 1642332610905505792
score 13.657419

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